Mm-wave integrated waveguide components in silicon technology

Transcription

1 Mm-wave integrated waveguide components in silicon technology G. Gentile, M. Spirito, L.C.N. de Vreede, et al. Electronics Research Laboratory (ELCA), Dimes, Delft University of Technology, The Netherlands Delft University of Technology Challenge the future

2 Motivation: transmission line How to distribute signal over large area (on and off chip) minimizing losses? Zhang J., Jackson, M.K.; Long, J.R.; Sadr, S., "Millimeter-wave characteristics of SiGe heterojunction bipolar transistors and monolithic interconnects in silicon technologies," ISSCC 2001 Mm-wave integrated waveguide components in silicon technology

3 Motivation: bulk waveguide Mm-wave integrated waveguide components in silicon technology

4 Motivation: mm-wave waveguide Micro-machined PCB Dedicated process C.E. Collins, et al., A new micro-machined millimeter-wave and terahertz snap-together rectangular waveguide technology, IEEE Microw. Guided Wave Lett., K. Wu, et al., The substrate Integrated Circuits a New Concept for High-Frequency Electronics and Optoelectronics PCB Manufacturing Variation Impact on High Frequency Measurement Fixtures IEEE TELSIKS M. Henry, et al., "Millimeter Wave Substrate Integrated Waveguide Antennas: Design and Fabrication Analysis," Advanced Packaging, IEEE Transactions on, Mm-wave integrated waveguide components in silicon technology

5 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

6 KOH waveguide process Silicon filled substrate integrated waveguide (a) (c) (b) (d) Mm-wave integrated waveguide components in silicon technology

7 KOH waveguide process Continuous metal side walls Size reduction (silicon dielectric) Photo-lithographic accuracy Bi-CMOS-compatible Planar feed Mm-wave integrated waveguide components in silicon technology

8 KOH waveguide process Thick metal coverage (> 2 skin depths) Accuracy: ~1 um Minimum gap: 10 um Mm-wave integrated waveguide components in silicon technology

9 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

10 Intrinsic waveguide: design Trapezoidal cross-section Equivalent rectangular waveguide Fundamental mode: TE 10 -like Intrinsic impedance 50 Ω Propagation constant: γ = α + j β Mm-wave integrated waveguide components in silicon technology

11 Wave number [rad/mm] Loss [db/mm] Intrinsic waveguide: gamma transition waveguide transition j S11 S 21 S22 S 21 port 1 port 2 S21 S j 22 S21 S 11 0 e e measured simulated 0.8 simulated measured Frequency [GHz] Frequency [GHz] Mm-wave integrated waveguide components in silicon technology

12 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

13 CPW-WG transition: design Planar way to feed energy into a 3D structure Facilitates interconnection to other dies: flip-chip bondwires Mm-wave integrated waveguide components in silicon technology

14 CPW-WG transition: design Planar way to feed energy into a 3D structure Facilitates interconnection to other dies: flip-chip bondwires Mm-wave integrated waveguide components in silicon technology

15 CPW-WG transition: S-parameters De-embedding of the transition effects: - L 1 -L 2 algorithm port 1 transition S S S S waveguide 0 e j e j 0 S S transition S S port 2 Mm-wave integrated waveguide components in silicon technology

16 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

17 Frequency scanning array Mm-wave integrated waveguide components in silicon technology

18 Frequency scanning array Mm-wave integrated waveguide components in silicon technology

19 Frequency scanning array Mm-wave integrated waveguide components in silicon technology

20 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

21 Slotted waveguide: design Equivalent rectangular waveguide TE 10 surface currents width length center offset waveguide width Mm-wave integrated waveguide components in silicon technology

22 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

23 Uniform offset array: setup Near field sampling with waveguide wafer probe VNA CNC-machine Mm-wave heads Microscope PC W-band calkit Wafer chuck + positioners + probes Mm-wave integrated waveguide components in silicon technology

24 Uniform offset array: near field Measured near field vs. excitation coefficients 190 μm 190 μm Mm-wave integrated waveguide components in silicon technology

25 E norm [db] [deg.] Uniform offset array: far field theoretical simulated [deg] freq [GHz] Mm-wave integrated waveguide components in silicon technology

26 Uniform offset array: summary Array type Uniform Number of slots 36 Array length [mm] Center frequency [GHz] 94 Scanning angle [degree] 92 Bandwidth [GHz] 20.8 HPBW [degree] 5 SLL [degree] 23 Mm-wave integrated waveguide components in silicon technology

27 Outline KOH waveguide process Intrinsic waveguide Coplanar to waveguide transition Frequency scanning array: Slotted waveguide Uniform offset array Conclusions Mm-wave integrated waveguide components in silicon technology

28 Conclusions: waveguide Mm-wave interconnections Bi-CMOS-compatible process Losses: GHz) Mm-wave integrated waveguide components in silicon technology

29 Conclusions: transition Coplanar feed Interconnection to ICs Broad band Mm-wave integrated waveguide components in silicon technology

30 E norm [db] Conclusions: array Fine lithography accuracy Uniform offset array [deg] Mm-wave integrated waveguide components in silicon technology

31 Acknowledgments The authors would like to thank: the DIMES group, R. Dekker, P. de Graaf, A. Akhnoukh, M. Pelk and J. Long, Delft University of Technology The SmartMix MEMPHIS project R. Jackson, University of Massachusetts Mm-wave integrated waveguide components in silicon technology