Q PLUS SERIES OPTIONS, SPARES & CONSUMABLES LIST

Transcription

1 COATING SOLUTIONS Q PLUS SERIES OPTIONS, SPARES & CONSUMABLES LIST The Q Plus Series is suitble for both sputter coting metls, crbon nd metl evportion in SEM, FE-SEM nd TEM pplictions. You cn be ssured, whtever your smple - the mrket leding Q Plus Series hs it covered. SPUTTER AND EVAPORATION Q150 Plus Series Q300 Plus Series The Q Plus Series hs it covered: quorumtech.com

2 Q150V Plus Ordering Informtion Q150V S Plus Sputter Coter optimised for high-vcuum pplictions. High resolution turbomoleculr pumped cpcitive touch-screen controled sputter coter with sttus LED indictor, including quick relese sputter insert nd one TK mm dimeter x 0.3mm chromium trget rotting specimen stge, 50mm dimeter, supplied s stndrd Q150V E Plus Crbon Evportor optimised for high-vcuum pplictions. Turbomoleculr pumped cpcitive touch-screen controled crbon evportor with sttus LED indictor suitble for TEM nd SEM pplictions. Fitted with crbon rod evportion hed for 3.05mm dimeter crbon rods. Supplied with crbon rods (C mm x 300mm) nd crbon rod shper (mnul opertion) rotting specimen stge, 50mm dimeter, supplied s stndrd Q150V ES Plus Combined Sputtering nd Crbon Coting System optimised for high-vcuum pplictions. The deposition heds cn be swpped in seconds nd the intelligent system logic utomticlly recognises which hed is in plce nd displys the pproprite operting settings. Consists of high resolution turbomoleculr pumped cpcitive touch-screen controled sputter coter nd crborn evportor with sttus LED indictor, including quick relese sputter insert nd one TK mm dimeter x 0.3mm chromium trget, nd high vcuum crbon rod evportion coter, including quick-relese crbon rod insert for 3.05mm dimeter crbon rods. Coting inserts re interchngeble rotting specimen stge, 50mm dimeter, supplied s stndrd. Rotry pump requirements: m3hr-1 2 Stge Oil Seled Rotry Vne Pump Dry pumping option: Diphrgm pump. Vcuubrnd MD1 23 L/m Options nd ccessories: Hed inserts nd glow dischrge Additionl sputter insert for quick metl chnge (V E nd V ES version only). NB: this is n entire sputtering ssembly - individul trgets cn lso be purchsed Crbon fibre insert. Supplied with 2 m C5421 crbon fibre cord Crbon Rod Evportion Insert. For 6.15mm dimeter crbon rods Metl evportion nd perture insert. Including the bility to evporte upwrds or downwrds (V E nd V ES version only). Supplied with pck of 10 tungsten filments (B5230) nd molybdenum (Mo) bot Glow dischrge insert Specimen stges mm Stge Tilt Stge Assembly. 50mm dimeter specimen stge with djustble tilt up to 90 degrees Slide Stge. For glss microscope slides (up to 2 x 75mm x 25mm slides) "Rotcot" Type Stge. Vrible tilt ngle, plnetry stge, rottionl speed 8-20 rpm " Wfer Stge nd Gerbox Flt rottion specimen stge for 4" wfers " Wfer stge. A flt 4"/102 mm flt, drop-in wfer stge which ccepts 2", 3" or 4" wfers Tilt Stge Assembly 4" " Stub Holder Plce Stub Stge for 30mm nd 32mm ø stubs Plce Stub Stge for 25mm nd 30mm ø stubs Plce Coverslip Stge 92 mm ø stge ccepts nine 20 x 20mm cover slips Plce 25mm ø Stub Stge Consumbles nd spre prts Additionl Stndrd Glss Cylinder Assembly. Includes glss chmber, implosion gurd nd gskets Stndrd Coting Shield Assembly Extended Glss Cylinder Assembly. 220mm high (stndrd chmber is 133mm high). For incresed source to smple distnce nd coting lrge smples Extended Height Coting Shield Assembly B5230 Tungsten filment bsket - pck of 10 (for use with metl evportion insert). B5228 Molybdenum bots - pck of Film Thickness Monitor (FTM) Attchment. Including oscilltor, feed-through, qurtz crystls nd holder. Plese note, when evporting crbon, the FTM idelly should only be used to provide generl indiction of the coting thickness. It is not recommended tht the FTM is used for termintion of the coting process. Film Thickness Monitor (FTM) Crystl (spre) Diphrgm Pump MD1 23 L/M O7803 Bsic Oil Mist Filter (spre) L Rotry Pump Oil (spre) L Rotry Pump Oil (spre) O-ring (ech) 2 required per coter Non-sel L Gsket Q150V ES Two Yer Spres Kit Q150V E Two Yer Spres Kit Q150V S Two Yer Spres Kit COATING SOLUTIONS

3 Q150T Plus Series Ordering Informtion Q150T S Sputter Coter. High resolution turbomoleculr pumped cpcitive touch-screen controled sputter coter with sttus LED indictor, including quick relese sputter insert nd one TK mm dimeter x 0.3mm chromium trget rotting specimen stge, 50mm dimeter, supplied s stndrd Q150T E Plus Crbon Evportor. Turbomoleculr pumped cpcitive touch-screen controled crbon evportor with sttus LED indictor suitble for TEM nd SEM pplictions. Fitted with crbon rod evportion hed for 3.05mm dimeter crbon rods. Supplied with crbon rods (C mm x 300mm) nd crbon rod shper (mnul opertion) rotting specimen stge, 50mm dimeter, supplied s stndrd Q150T ES Plus Combined Sputtering nd Crbon Coting System. The deposition heds cn be swpped in seconds nd the intelligent system logic utomticlly recognises which hed is in plce nd displys the pproprite operting settings. Consists of high resolution turbomoleculr pumped cpcitive touch-screen controled sputter coter nd crbon evportor with sttus LED indictor, including quick relese sputter insert nd one TK mm dimeter x 0.3mm chromium trget, nd high vcuum crbon rod evportion coter, including quick-relese crbon rod insert for 3.05mm dimeter crbon rods. Coting inserts re interchngeble rotting specimen stge, 50mm dimeter, supplied s stndrd. Rotry pump requirements: m3hr-1 2 Stge Oil Seled Rotry Vne Pump Dry pumping option: Diphrgm pump. Vcuubrnd MD1 23 L/m Options nd ccessories: Hed inserts nd glow dischrge Additionl sputter insert for quick metl chnge (T E nd T ES version only). NB: this is n entire sputtering ssembly - individul trgets cn lso be purchsed Plce 25mm ø Stub Stge Tilt Stge Assembly 4 Consumbles nd spre prts Film Thickness Monitor (FTM) Attchment. Including oscilltor, feed-through, qurtz crystls nd holder. Plese note, when evporting crbon, the FTM idelly should only be used to provide generl indiction of the coting thickness. It is not recommended tht the FTM is used for termintion of the coting process Crbon fibre insert. Supplied with 2 m C5421 crbon fibre cord. Film Thickness Monitor (FTM) Crystl (spre) Crbon Rod Evportion Insert. For 6.15mm dimeter crbon rods Metl evportion nd perture insert. Including the bility to evporte upwrds or downwrds (T E nd T ES version only). Supplied with pck of 10 tungsten filments (B5230) nd molybdenum (Mo) bot Glow dischrge insert Specimen stges mm Stge Tilt Stge Assembly. 50mm dimeter specimen stge with djustble tilt up to 90 degrees Slide Stge. For glss microscope slides (up to 2 x 75mm x 25mm slides) "Rotcot" Type Stge. Vrible tilt ngle, plnetry stge, rottionl speed 8-20 rpm " Wfer Stge nd Gerbox Flt rottion specimen stge for 4" wfers " Wfer stge. A flt 4"/102 mm flt, drop-in wfer stge which ccepts 2", 3" or 4" wfers Stub Holder Plce Stub Stge for 30mm nd 32mm ø stubs Plce Stub Stge for 25mm nd 30mm ø stubs Plce Coverslip Stge 92 mm ø stge ccepts nine 20 x 20mm cover slips Rotting vcuum spigot. Allows more convenient connection of the vcuum hose to the rer of the Q150T Plus - useful for when bench depth is limited Extended height vcuum chmber. (214 mm high - the stndrd chmber is 127 mm high). For incresed source-to- specimen distnce nd for coting lrge specimens Stndrd Coting Shield Assembly Extended Height Coting Shield Assembly B5228 Molybdenum bots - pck of 10 B5230 G6260 Tungsten filment bsket - pck of 10 (for use with metl evportion insert) Glss cylinder 6 dimeter Additionl glss cylinder ssembly O7803 Bsic Oil Mist Filter (spre) L Rotry Pump Oil (spre) L Rotry Pump Oil (spre) Non-sel L Gsket Two-yer spres kit for Q150T S Plus Two-yer spres kit for Q150T E Plus Two-yer spres kit for Q150T ES Plus The Q Plus Series hs it covered: quorumtech.com

4 Q150R Plus Series Ordering Informtion Q150R S Plus Sputter Coter.Fully utomtic, cpcitive touch-screen controled rotry pumped sputter coter with sttus LED indictor. Including quick relese sputter insert nd one SC A 57mm dimeter x 0.1mm gold trget rotting specimen stge, 50mm dimeter, supplied s stndrd Q150R E Plus Crbon Evportor. Fully utomtic, cpcitive touch-screen controled rotry pumped crbon fibre evportion coter with sttus LED indictor. Including quick-relese crbon fibre insert for evportion of crbon cord. Supplied with C5421 crbon fibre cord, rotting specimen stge, 50mm dimeter, supplied s stndrd Q150R ES Combined Sputtering nd Crbon Coting System. Consists of fully utomtic, cpcitive touch-screen controled rotry pumped sputter coter nd crbon evportor with sttus LED indictor. Including quick relese sputter insert nd one SC A 57mm dimeter x 0.1mm gold trget, nd crbon fibre evportion coter, including quick-relese crbon fibre insert for evportion of crbon cord. Coting inserts re interchngeble nd cn be swpped in seconds. The intelligent system logic utomticlly recognises which insert is in plce nd displys the pproprite operting settings rotting specimen stge, 50mm dimeter, supplied s stndrd. Rotry pump requirements: m3hr-1 2 Stge Oil Seled Rotry Vne Pump Options nd ccessories: Hed inserts nd glow dischrge Crbon rod evportion insert for 3.05 mm Ø rods (R E nd R ES only). Includes crbon rod shper nd wedge tool C5422 (3.05 mm Ø x 300 mm pcket of ten) crbon rods Additionl sputter insert for quick metl chnge (RE nd R ES version only). NB: this is n entire sputtering ssembly - individul trgets cn lso be purchsed Glow dischrge insert. Used to modify surfce properties (e.g. hydrophobic to hydrophilic conversion) (R S nd R ES versions only). Cn be retrofitted. Specimen stges mm Stge Tilt Stge Assembly. 50mm dimeter specimen stge with djustble tilt up to 90 degrees Slide Stge. For glss microscope slides (up to 2 x 75mm x 25mm slides) "Rotcot" Type Stge. Vrible tilt ngle, plnetry stge, rottionl speed 8-20 rpm " Wfer Stge nd Gerbox Flt rottion specimen stge for 4" wfers " Wfer stge. A flt 4"/102 mm flt, drop-in wfer stge which ccepts 2", 3" or 4" wfers Tilt Stge Assembly 4" Consumbles nd spre prts Film thickness monitor (FTM) ttchment. Including oscilltor, feed-through, qurtz crystl holder nd qurtz crystls. Spre qurtz crystl Extended height vcuum chmber. (214 mm high - the stndrd chmber is 127 mm high). For incresed source-to-specimen distnce nd for coting lrge specimens Rotting vcuum spigot. Allows more convenient connection of the vcuum hose to the rer of the Q150R Plus - useful for when bench depth is limited Stndrd coting shield ssembly Extend height coting shield ssembly Additionl stndrd glss cylinder ssembly. Includes stndrd glss chmber, implosion gurd nd gskets Pltinum coting vcuum hose ssembly. Recommended for if pltinum (Pt) is to be sputtered (R S nd R ES versions only) Two-yer spres kit for Q150R Plus S Two-yer spres kit for Q150R Plus E Two-yer spres kit for Q150R Plus ES. O7803 Bsic oil mist filter (spre) Pump oil 1 litre Pump oil 5 litre L Gsket (ech) " Stub Holder Plce Stub Stge for 30mm nd 32mm ø stubs Plce Stub Stge for 25mm nd 30mm ø stubs Plce Coverslip Stge 92 mm ø stge ccepts nine 20 x 20mm cover slips Plce 25mm ø Stub Stge COATING SOLUTIONS

5 Q300T D Plus Ordering Informtion Q300T D Plus Dul Trget Sequentil Sputtering System Includes 57 mm Ø x 0.3 mm chromium (Cr) trget (TK8845) nd 57 mm Ø x 0.1 mm thick gold (Au) trget (SC A). A flt rottion stge for 4 /100 mm wfers is included. Rotry pump requirements: m3/hr Pfeiffer DUO 6 two-stge rotry vcuum pump. Includes vcuum hose, coupling kit nd oil mist filter. Dry pumping options: Diphrgm pump. A dry lterntive to the stndrd oil-bsed rotry pump, complete with vcuum hose, coupling kit nd oil mist filter. Consumbles nd spre prts Dul chnnel film thickness monitor (FTM). A fully integrted system using the Q300T D touch screen disply for the control nd disply of ll FTM functions. Allows utomtic termintion of the sputtering process t pre-selected thickness vlues. Displys rte for sputtering processes in nm/m, with resolution of 0.1 nm. Two FTM crystl holders re fixed in the chmber to give optiml position for both trgets nd to cot one mteril per crystl. Includes two spre qurtz crystls Edwrds dry scroll pump nxds10i. Pumping speed: 11.4 m/3hr. Spre qurtz crystl. Options nd ccessories: Stge options: Rotting 50 mm Ø specimen stge with djustble tilt. The plt form hs six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8 pin stubs. Stge rottion speed is vrible between preset limits. NB: Trget to stge height is vrible between 0-42 mm for the stndrd stge. When used with the extended height cylinder (optionl ccessory 10596) the trget to stge height is n dditionl 87 mm mm Ø vrible height specimen stge. Hs six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs mm Ø Rotcot stge. A rotry plnetry-style stge with vrible tilt ngle from horizontl to 30º. The pltform hs six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8 pin stubs. Rottion speed is vrible between preset limits. Note: Depending on specimen height, this stge my require the optionl extended height cylinder Extended height vcuum chmber. (214 mm H - the stndrd chmber is 127mm H). Recommended for incresed source-to-specimen distnce nd for coting lrge specimens Rotting vcuum spigot. Allows more convenient connection of the vcuum pump hose to the rer of the coter for when bench depth is limited Lockble emergency stop (e-stop) switch. This cn be mounted on top of the system in position esily ccessible for the opertor. It is provided with key to relese the knob fter ctivtion. NB: The ddition of the e-stop does not inhibit or replce the norml on/off switch function Coting shields. Cn be fitted to protect lrge surfces from coting deposition - esily removble for ese of clening Full rnge, ctive vcuum guge. Cpble of mesurement over the rnge of 1,000 mbr to 5 x 10-9 mbr. Typicl ultimte vcuum of system is 5 x 10-5mbr. Must be fctory fitted Spres Kit for Q300T D Plus mm Ø specimen stge for glss microscope slides. For up to two 75 mm x 25 mm slides or single 75 mm x 50 mm slide). The stge cn lterntively ccommodte up to six 1/8 SEM pin stubs. The stge rottion speed is vrible between preset limits nd includes ger box to llow the optionl FTM to be used. The Q Plus Series hs it covered: quorumtech.com

6 Q300T T Plus Series Ordering Informtion Q300T T Plus Triple Trget, Lrge Chmber, Turbo-Pumped Sputter Coter Fitted with three sputtering heds to ensure even metl deposition. Includes three 57 mm Ø x 0.3 mm chromium (Cr) sputter trgets (TK8845). A flt rottion stge for 200 mm/8 nd 150 mm/6 wfers is fitted s stndrd. Rotry pump requirements: m3/hr Pfeiffer DUO 6 two-stge rotry vcuum pump. Includes vcuum hose, coupling kit nd oil mist filter. Dry pumping options: Diphrgm pump. A dry lterntive to the stndrd oil-bsed rotry pump, complete with vcuum hose, coupling kit nd oil mist filter. Consumbles nd spre prts Dul chnnel film thickness monitor (FTM). A fully integrted system using the Q300T D touch screen disply for the control nd disply of ll FTM functions. Allows utomtic termintion of the sputtering process t pre-selected thickness vlues. Displys rte for sputtering processes in nm/m, with resolution of 0.1 nm. Two FTM crystl holders re fixed in the chmber to give optiml position for both trgets nd to cot one mteril per crystl. Includes two spre qurtz crystls Edwrds dry scroll pump nxds10i. Pumping speed: 11.4 m/3hr. Spre qurtz crystl. Options nd ccessories: Stge options: Rotting 50 mm Ø specimen stge with djustble tilt. The plt form hs six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8 pin stubs. Stge rottion speed is vrible between preset limits. NB: Trget to stge height is vrible between 0-42 mm for the stndrd stge. When used with the extended height cylinder (optionl ccessory 10596) the trget to stge height is n dditionl 87 mm mm Ø vrible height specimen stge. Hs six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs mm Ø Rotcot stge. A rotry plnetry-style stge with vrible tilt ngle from horizontl to 30º. The pltform hs six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8 pin stubs. Rottion speed is vrible between preset limits. Note: Depending on specimen height, this stge my require the optionl extended height cylinder Extended height vcuum chmber. (214 mm H - the stndrd chmber is 127mm H). Recommended for incresed source-to-specimen distnce nd for coting lrge specimens Rotting vcuum spigot. Allows more convenient connection of the vcuum pump hose to the rer of the coter for when bench depth is limited Lockble emergency stop (e-stop) switch. This cn be mounted on top of the system in position esily ccessible for the opertor. It is provided with key to relese the knob fter ctivtion. NB: The ddition of the e-stop does not inhibit or replce the norml on/off switch function Coting shields. Cn be fitted to protect lrge surfces from coting deposition - esily removble for ese of clening Full rnge, ctive vcuum guge. Cpble of mesurement over the rnge of 1,000 mbr to 5 x 10-9 mbr. Typicl ultimte vcuum of system is 5 x 10-5mbr. Must be fctory fitted Spres Kit for Q300T T Plus mm Ø specimen stge for glss microscope slides. For up to two 75 mm x 25 mm slides or single 75 mm x 50 mm slide). The stge cn lterntively ccommodte up to six 1/8 SEM pin stubs. The stge rottion speed is vrible between preset limits nd includes ger box to llow the optionl FTM to be used. COATING SOLUTIONS

7 Sputter Trgets Q150R PLUS Q150T PLUS Q150V PLUS Q300T T PLUS Q300T D PLUS SC A Gold (Au) SC A/ 0.2mm Gold (Au) 0.2 mm TK8889 Gold (Au) 0.3 mm SC B Gold/plldium (Au/Pd - 80:20) SC B/0.2mm Gold/plldium (Au/Pd - 80:20%) 0.2 mm TK8891 Gold/plldium (Au/Pd - 80:20) 2 mm SC C Pltinum (Pt). SC C/0.2mm Pltinum (Pt) 0.2 mm TK8893 Pltinum (Pt) 0.3 mm SC D Nickel (Ni) SC E Silver (Ag) SC G Plldium (Pd) SC H Copper (Cu) TK8878 Pltinum/Plldium (Pt/Pd - 80:20) TK8887 Pltinum/Plldium(Pt/Pd -80:20) 0.3mm TK8845 Chromium (Cr) 0.3 mm TK8862 Chromium (Cr)1.5 mm TK8867 Tungsten (W) 0.2 mm TK8846 Tungsten (W) 0.5 mm TK8869 Crbon (C) 1.5 mm TK8875 Aluminium (Al) 1 mm TK8895 Titnium (Ti) 0.5 mm TK8879 Titnium (Ti) 1.5 mm TK8897 Iron (Fe) TK8899 Iridium (Ir) 0.3 mm TK8900 Cobolt (Co) 0.3 mm TK8902 Tin (Si) TK8903 Molybdenum TK8905 Mgnesium (Mg) 0.3 mm thick TK8906 Tntlum (T) TK8907 Indium tin oxide (ITO) TK9000 Alluminium (Al) 0.76mm TK8870 Copper (Cu) 1.5 mm TK8859 Gold (Au) 0.1 mm TK8860 Gold/plldium (Au/Pd) 0.1 mm TK8872 Nickel (Ni) 0.1 mm TK8877 Plldium (Pd) 0.1 mm TK8861 Pltinum (Pt) 0.1 mm TK8871 Silver (Ag) 0.1 mm Crbon Supplies Q150R PLUS Q150T PLUS Q150V PLUS Q300T T PLUS Q300T D PLUS A0830A Crbon rods 6.15 mm Ø x 100 mm length (unshped) - pck of 10 NA NA NA C5422 Crbon rods 3.05 Ø x 100 mm, (unshped) - pck of 10 NA NA C5421 Crbon fibre cord - 1 m NA NA C Crbon fibre cord - 10 m NA NA C Crbon fibre cord m NA NA C5461 Crbon fibre - fine strnds (1m) NA NA C Crbon fibre - fine strnds (10m) NA NA C Crbon fibre - fine strnds (100m) NA NA Mnul crbon rod shper for 3.05 mm Ø crbon rods NA NA Crbon gun insert 3.05 mm NA NA Wedge tool NA NA The Q Plus Series hs it covered: quorumtech.com

8 The Q Plus Series QSeries Rev Fetures Q150R PLUS Q150T PLUS Q150V PLUS Q300T T PLUS Q300T D PLUS New touch nd swipe cpcitive screen USB port for upgrdes nd downlod of log files Multiple-user profiles cn be set up on one mchine New softwre sorts recipes per user ccording to recent use 16GB of flsh memory cn store more thn 1000 recipes Sttus indiction through visul multi-colour LED Audio notifiction when process completed Crete recipe sequences with simple copy, drg nd drop opertion Interchngeble stge options Interchngeble plug-in heds Cpble of chieving vcuum 2 x 10-3 mbr Cpble of chieving vcuum 5 x 10-5 mbr Cpble of chieving vcuum 1 x 10-6 mbr FTM control on crbon deposition s n option Three sputter heds for lrge re deposition of different mterils Single hed selection for smll smples Multi-lyer deposition of two mterils Benefits Q150R PLUS Q150T PLUS Q150V PLUS Q300T T PLUS Q300T D PLUS Single system for sputter nd crbon coting Esy selection for frequently used recipes Esy configurtion of hed nd stge options for different smples Esy to see multi-colour sttus indictor light from distnce Ultr-fine grin size coting cpbility Ultr-fine crbon coting for high-resolution pplictions using crbon rods High purity depositions Lrge re of depositions - up to 200mm dimeter Recommended Applictions Q150R PLUS Q150T PLUS Q150V PLUS Q300T T PLUS Q300T D PLUS Low nd medium mgnifictions SE Signl boost (1nm or less) Tble-top SEM coting Elementl nlysis Copper metllistion of lyers High-resolution mgnifiction SEM Protective pltinum lyers for FIB R&D of corrosion-, friction-, nd wer- protective lyers Protective lyers on medicl devices Crbon coting of replics BSE imging EDX, WDS, EBSD nlysis Crbon coting of TEM grids Ultr-high resolution mgnifiction SEM Nno-technology e.g. Zeolites, polymer nnobrushes Wfer inspection Multiple smple prep for SEM Mterils pplictions - idel for multi-lyer cotings +44 (0) sles@quorumtech.com quorumtech.com Products re for Reserch Use Only. While every effort hs been mde to ensure ccurcy, no responsibility cn be ccepted for errors or omissions. Dt my chnge, s well s legisltion nd you re strongly dvised to obtin copies of the most recently issued regultions, stndrds nd guidelines. This document does not form the bsis of contrct. Quorum hs policy of ongoing product improvement nd reserves the right to chnge specifictions without notice Quorum Technologies Limited. All rights reserved.