2011 OpenDFM Overview: A Customer Perspective. Fred Valente Distinguished Member Technical Staff Texas Instruments Incorporated

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1 2011 OpenDFM Overview: A Customer Perspective Fred Valente Distinguished Member Technical Staff Texas Instruments Incorporated 1

2 Key Players Texas Instruments Fred Valente Lisa Fisher Si2 -- Jake Buurma Synopsys Cathy Rogers John Studdars Magma Rob Macys Jonathan White Cadence Jonathan Lee Andrew Stanaski 2

Why OpenDFM? High level, EDA tool independent meta-language fully supported by major EDA tool vendors. Portability across the various DRC tools, so no need to re-code when switching tools.

3 Why OpenDFM? High level, EDA tool independent meta-language fully supported by major EDA tool vendors. Portability across the various DRC tools, so no need to re-code when switching tools. Saves time and money. Contains the critical commands for rule check generation. Allows the use of native tool coding when required. Uses a common TCL-based parser and individual vendor libraries to quickly generate DRC decks per vendor platform. Cool! 3

4 What s in OpenDFM? The OpenDFM (DRC) toolbox contains more than 100 DRC related commands. Currently there are over 40 of these commands up and running in all of the major vendor libraries. Examples of the critical commands: resize, grow, shrink derive (using logical layer operations) space, width, length, enclosure, extension, area special end-of-line commands 4

5 End-Of-Line (EOL) Details Note: drawing from OpenDFM check_eol_space spec 5

6 Development Si2, TI, Cadence, Magma and Synopsys work closely together to define/refine the opendfm DRC commands. TI has daily interactions with the tool vendors to develop, evaluate and debug these commands. Very simple gds layout test cases (pass/fail) that are specifically built for DRC code validation are used. 6

7 Coding TI coded a 28nm DRC deck using OpenDFM (>1100 rules coded). Used existing production (native) deck for comparison of results. For simple rule checks usually only one OpenDFM command is needed thanks to a comprehensive set of options per command. For more complicated rule checks a set of multiple OpenDFM commands is used. Use in-line native coding for those rule checks we are unable to write with the current OpenDFM commands. 7

8 Coding Examples set NW_S_1 300 dfmc::drawn_layer \ -rule_name drawn_1:1 \ -layer_name NWELL \ -layer_numbers {1} \ -data_types {1} \ -database_type rectilinear dfmc::check_space \ -rule_name NW.S.1 \ -in_layer NWELL \ -space_less_than $NW_S_1 \ -extension_type square \ -cmnt "NWELL minimum space is $NW_S_1 nm (sq. corner)" 8

9 Coding Examples set POLY_LINE_END_W 75 set POLY_LINE_END_L 25 set PO_S_3 60 dfmc::check_eol_space \ -rule_name PO.S.3 \ -in_layer ALLPOLY \ -space1_less_than 1 \ -space2_less_than $PO_S_3 \ -eol_extent_equals $PO_S_3 \ -width1_less_equal $POLY_LINE_END_W \ -width2_greater_than 1 \ -eol_length_greater_than $POLY_LINE_END_L \ -marker_layer NOT_SRAM \ -cmnt "POLY_LINE_END minimum space to ALLPOLY is $PO_S_3 nm" 9

10 Evaluation Initial OpenDFM vendor library evaluations were done using simple test case layouts (supplied to Si2 for member fanout). To more fully QC the vendor libraries a large (5mm x 5mm) layout database, which had a significant number of layout rule errors, was used. Both vendor library code and DRC deck errors were easily found and quickly corrected thanks to the close working relationships. Released alpha and beta versions of the 28nm DRC deck to an ongoing design project to be used in addition to the native code production DRC deck. 10

11 Metrics EDA Supplier A EDA Supplier B EDA Supplier C OpenDFM commands done Unit Rule Regression TI 28nm DRC Deck Coverage OpenDFM rules to Native rules ratio Large Design Run Time * 42/103 42/103 42/ % Pass 100% Pass 100% Pass 85% 85% 85% 6:1 6:1 6:1 1.0X 1.2X 2.1X * 28nm, 5mm x 5mm, 3.7GB test case on 8 cpu, 128GB linux server 11

12 Conclusion Outstanding commitment and support by Si2 and major EDA tool vendors. Transportable code allows for painless DRC tool changeovers. Efficient command list makes for fast and simple coding. Successful beta testing across multiple tool platforms. Currently using OpenDFM DRC as a secondary tool at the 28nm technology node. Plan to use OpenDFM DRC as the production tool at the 20nm technology node and beyond. 12

13 Q & A Please feel free to contact me at: f-valente@ti.com 13

14 Backup Slides 14

15 DRC Deck Complexity Increasing Thousands of Ground Rules for Physical Verification Multiple Rule Decks 15 Source: IBM DFMC Workshop

Rule Complexity Multiplied Across Tools Rules Document DRC Sign-off List DRC Sign-off List DRC Sign-off List DRC Sign-off List Proprietary Input Language

16 Rule Complexity Multiplied Across Tools Rules Document DRC Sign-off List DRC Sign-off List DRC Sign-off List DRC Sign-off List Proprietary Input Language Proprietary Input Language Proprietary Input Language Proprietary Input Language DRC Engine A DRC Engine B DRC Engine C DRC Engine D 16 Source: Jake Buurma, Si2

17 Extensible Library of Pattern Verification The OpenDFM Parser does not change when you add a new rule ~100 Files Adding a new DFM check only requires adding a new library routine in Tcl Targeting Functions DRC Checks CMP Checks Eol Checks 17

18 OpenDFM Verification Approach OpenDFM Test Case Layouts Layouts with No DRC Errors OpenDFM Parser Parser Implementation Layouts with Known DRC Errors API Socket API Socket API Socket DRC Engine A Plug-in DRC Engine B Plug-in DRC Engine C Plug-in =? OK Engine A Code Engine B Code Engine C Code =? OK Texas Instruments provided a contribution of the layouts to the DFMC Source: Jake Buurma, Si2 18

19 Options Tested Corner Extensions 19

20 Options Tested Edge Pairs Edge Pairs: all edge_to_edge edge_to_corner corner_to_corner edge_to_corner_or_edge 20

OpenDFM Targeting Functions. Bob Sayah June 6, 2011 IBM Corporation Si2 Targeting Working Group Chair

OpenDFM Targeting Functions. Bob Sayah June 6, 2011 IBM Corporation Si2 Targeting Working Group Chair OpenDFM Targeting Functions Bob Sayah June 6, 2011 IBM Corporation Si2 Targeting Working Group Chair Targeting Design Drawn Shapes Mfg. Targeting Targeting takes the Drawn Shapes provided by the layout